Title:
クライオポンプシステム、圧縮機、及びクライオポンプの再生方法
Document Type and Number:
Japanese Patent JP5669658
Kind Code:
B2
Abstract:
A cryopump system includes: a cryopump including a refrigerator for executing cooling operation for cooling a cryopanel and heating operation for regenerating the cryopanel; and a compressor for supplying operating gas to the refrigerator. The cryopump system raises the temperature of operating gas in the compressor during the heating operation than the temperature thereof during the cooling operation. The compressor may include a heat exchanger for cooling operating gas to be supplied to the refrigerator, and a bypass passage that circumvents the heat exchanger. The control unit may switch, in accordance with the operation status of the refrigerator, between a flow passage that passes through the heat exchanger and a flow passage that passes through the bypass flow passage.
Inventors:
松井 孝聡
Application Number:
JP2011087169A
Publication Date:
February 12, 2015
Filing Date:
April 11, 2011
Export Citation:
Assignee:
住友重機械工業株式会社
International Classes:
F04B37/08
Attorney, Agent or Firm:
Sakaki Morishita
Takehiro Murata
Tomoyoshi Miki
Kimio Tomidokoro
Takehiro Murata
Tomoyoshi Miki
Kimio Tomidokoro