Title:
CRYOPUMP SYSTEM, CRYOPUMP CONTROL DEVICE AND CRYOPUMP REGENERATION METHOD
Document Type and Number:
Japanese Patent JP2016153617
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To shorten a regeneration time of a cryopump.SOLUTION: A cryopump system includes a cryopump 10, and a regeneration control unit 102 configured to control the cryopump 10 according to a regeneration sequence containing discharge processing of discharging a condensate from the cryopump 10 and of executing roughing of the cryopump 10. The generation control unit 102 includes a pressure drop rate calculation unit 114 configured to calculate a pressure drop rate in the cryopump 10 during roughing of the cryopump 10, and includes a pressure drop rate monitoring unit 116 configured to detect contraction of the pressure drop rate during roughing.SELECTED DRAWING: Figure 2
Inventors:
YATSU TAKAHIRO
Application Number:
JP2015031852A
Publication Date:
August 25, 2016
Filing Date:
February 20, 2015
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JPH0914133A | 1997-01-14 | |||
| JPH08507115A | 1996-07-30 |
Foreign References:
| US6022195A | 2000-02-08 |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo