クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット

Title:

クライオポンプシステム、クライオポンプシステムの運転方法、及び圧縮機ユニット

Document Type and Number:

Japanese Patent JP5868224

Kind Code:

B2

Abstract:

A cryopump system includes a cryopump configured to perform a preparatory operation including a cooldown from a room temperature to a cryogenic temperature and to perform a vacuum pumping operation at the cryogenic temperature, a compressor unit of a working gas for the cryopump, a gas line connecting the cryopump and the compressor unit, a gas volume adjuster configured to increase a quantity of the working gas in the gas line during the vacuum pumping operation in comparison with that during the preparatory operation, and a control device configured to control the compressor unit so as to provide a pressure control for the gas line.

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Inventors:

Takashi Matsui

Application Number:

JP2012050725A

Publication Date:

February 24, 2016

Filing Date:

March 07, 2012

Export Citation:

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