制御された水素ガス放出を伴うクライオポンプ

Title:

制御された水素ガス放出を伴うクライオポンプ

Document Type and Number:

Japanese Patent JP5779253

Kind Code:

B2

Abstract:

A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.

Inventors:

Aircobbat Michael Jay
Bartlett Allen Jay
Caselo john jay
Wealth Jeffrey A

Application Number:

JP2013541053A

Publication Date:

September 16, 2015

Filing Date:

November 23, 2011

Export Citation:

Click for automatic bibliography generation Help