CRYOPUMP WITH LOUVER BLIND TYPE BAFFLE

Title:

CRYOPUMP WITH LOUVER BLIND TYPE BAFFLE

Document Type and Number:

Japanese Patent JPH0742671

Kind Code:

A

Abstract:

PURPOSE: To improve exhaust speed without enlarging a pump.

CONSTITUTION: Plural rows of cryopanels 12 are disposed vertically in an 80K shield, and the cryopanels 12 are surrounded by vertical louver type baffles 13 so that the cryopanels 12 are invisible from an intake port (gas inflow port) B. Inside a back face shielding plate 21 opposed to the intake port B, a cryopanel 22 provided with 80K baffles 23 is disposed parallel with the back face shielding plate 21. Hydrogen can be thereby exhausted even at the shield bottom part positioned inside the back face shielding plate 21, so that the exhaust speed can be increased, and in association with this, the size of a cryopump can be made small in comparison to a conventional system in the case of the same exhaust speed.

Inventors:

MORIMOTO HIDETOSHI

Application Number:

JP19128493A

Publication Date:

February 10, 1995

Filing Date:

August 02, 1993

Export Citation:

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Assignee:

ULVAC KURAIO KK

International Classes:

F04B37/08; F04B39/00; (IPC1-7): F04B37/08; F04B39/00

Attorney, Agent or Firm:

Shigeru Yagita (4 outside)

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