Title:
CRYOPUMP
Document Type and Number:
Japanese Patent JP2017036731
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To improve the gas storage amount of a cryopump.SOLUTION: A cryopump 10 includes a gas flow adjustment member 80 which deflects flow of a gas, which flows from a shield main opening 34, from a refrigerator structure part 21. The gas flow adjustment member 80 is disposed adjacent to the refrigerator structure part 21 so as not to contact with both a second cooling stage 24 of a refrigerator 16 and a second cryopanel unit 20. The gas flow adjustment member 80 may be thermally coupled to a first cooling stage 22 of the refrigerator 16.SELECTED DRAWING: Figure 1
Inventors:
YATSU TAKAHIRO
Application Number:
JP2016155282A
Publication Date:
February 16, 2017
Filing Date:
August 08, 2016
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP2010516939A | 2010-05-20 |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Previous Patent: SYSTEM AND METHOD FOR SUPPORTING TURBINE SHROUD
Next Patent: DRAINAGE DEVICE AND METHOD OF CONTROLLING DRAINAGE DEVICE
Next Patent: DRAINAGE DEVICE AND METHOD OF CONTROLLING DRAINAGE DEVICE