Title:
クライオポンプ
Document Type and Number:
Japanese Patent JP5822747
Kind Code:
B2
Abstract:
A cryopump includes a low-temperature cryopanel, a high-temperature cryopanel provided outside the low-temperature cryopanel, and a housing provided outside the high-temperature cryopanel. The high-temperature cryopanel includes an extension panel extending outward. The housing includes an inlet flange surrounding the extension panel.
Inventors:
Oikawa Ken
Application Number:
JP2012021289A
Publication Date:
November 24, 2015
Filing Date:
February 02, 2012
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F04B37/08; F04B37/16
Domestic Patent References:
| JP2008223538A |
Attorney, Agent or Firm:
Sakaki Morishita
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo
Yusuke Murata
Tomoyuki Miki
Tomisho Teruo