PURPOSE: To provide a cryopump with a large exhaust capacity by providing a plurality of blades on a plurality of baffles of a cryopump so that gas with high radiant heat and condensation temperature is prevented from reaching a panel through an opening of the baffle.
CONSTITUTION: Gas such as moisture, carbon dioxide with high condensation temperature entering a casing 20 from an exhaust body 80 is condensed, adsorbed and collected by blades 42 of a baffle 40. And gas with high condensation temperature which is not collected by said blades 42 reaches the other baffles 60 and condensed adsorbed and collected by blades 62. On the other hand, gas with low condensation temperature passes through baffles 40, 60 to be condensed, adsorbed and collected by a panel 31. Also, a portion of radiant heat from the exhaust body 80 is absorbed and removed by the blades 42, 62 of baffles 40, 60 so that the temperature of the panel 31 does not rise and exhaust speed of the cryopump can be prevented from reduction.
HITACHI TECHNO ENG CO LTD
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