Title:
CRYOPUMP
Document Type and Number:
Japanese Patent JPH04194376
Kind Code:
A
Abstract:
PURPOSE: To shorten the depth of a cryopump and reduce the volumetric capacity by having a cryopanel tilted to an inflow port face of the cryopump.
CONSTITUTION: A gas molecule to be exhausted flows in the arrow direction from a gap between front heat shield plates 1 set up in front of a cryopump. A main cryopanel 2 is tilted so as to make angle α smaller in direction of 0° from 90° to an inflow port face, and a group of a cold louvers 3 is installed. Thus, an interval between the front heat shield plate 1 and a rear heat shield plate 6 is narrowed, thereby reducing the volumetric capacity.
Inventors:
KAMIIDE YASUO
YAMASHITA YASUO
KAWAKAMI HIROYUKI
SAHO NORIHIDE
YAMASHITA YASUO
KAWAKAMI HIROYUKI
SAHO NORIHIDE
Application Number:
JP32287590A
Publication Date:
July 14, 1992
Filing Date:
November 28, 1990
Export Citation:
Assignee:
HITACHI LTD
International Classes:
F04B37/08; (IPC1-7): F04B37/08
Attorney, Agent or Firm:
Katsuo Ogawa (2 outside)