Title:
CRYOTRAP
Document Type and Number:
Japanese Patent JP2017020446
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To enable a cryotrap to be applicable to a freeze dry (vacuum dry) device.SOLUTION: In the cryotrap where a low-temperature panel 38a cooled by a mechanical refrigerator 38b is placed in a chamber 11 that is a space to be deaired while being separated from a wall of a case 31, one plate surface of the low-temperature panel is placed while directed toward a deairing source F1 in the chamber and an orifice plate 33 is placed forward of the one plate surface.SELECTED DRAWING: Figure 1
Inventors:
YASUDA JUNICHI
MURAYAMA YOSHINOBU
MORIMOTO HIDETOSHI
MURAYAMA YOSHINOBU
MORIMOTO HIDETOSHI
Application Number:
JP2015139977A
Publication Date:
January 26, 2017
Filing Date:
July 13, 2015
Export Citation:
Assignee:
ULVAC KURAIO KK
International Classes:
F04B37/16; F04B37/08; F26B5/06
Domestic Patent References:
| JP2014208993A | 2014-11-06 | |||
| JP2010084702A | 2010-04-15 | |||
| JP2014509365A | 2014-04-17 | |||
| JP5574318B2 | 2014-08-20 | |||
| JP2011117464A | 2011-06-16 |
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki