Title:
CRYOTRAP
Document Type and Number:
Japanese Patent JP2017020737
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To enable a cryotrap to be usable in a vacuum dry atmosphere where a corrosion resistance gas is present.SOLUTION: In the cryotrap where a low-temperature panel 38a cooled by a mechanical refrigerator 38b is placed in a case connected to a chamber 11 that is a space to be deaired while being separated from a wall of a case 11, a cooling separation partition wall 36 coming into contact with one plate surface of the low-temperature panel and separating an interior of the case into a chamber side 30A and a low-temperature panel side 30B is placed.SELECTED DRAWING: Figure 1
Inventors:
YASUDA JUNICHI
MURAYAMA YOSHINOBU
MORIMOTO HIDETOSHI
MURAYAMA YOSHINOBU
MORIMOTO HIDETOSHI
Application Number:
JP2015139978A
Publication Date:
January 26, 2017
Filing Date:
July 13, 2015
Export Citation:
Assignee:
ULVAC KURAIO KK
International Classes:
F26B5/04; F04B37/08; F04B37/16
Domestic Patent References:
| JP2005527366A | 2005-09-15 | |||
| JPH10122143A | 1998-05-12 | |||
| JP2009019501A | 2009-01-29 |
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki
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