Title:
水晶摩擦真空計
Document Type and Number:
Japanese Patent JP4377196
Kind Code:
B2
Inventors:
Kawasaki Yosuke
Application Number:
JP2003360459A
Publication Date:
December 02, 2009
Filing Date:
October 21, 2003
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
G01L21/22
Domestic Patent References:
| JP2002148130A | ||||
| JP62184446U | ||||
| JP10086682A | ||||
| JP2000028465A | ||||
| JP3068828A | ||||
| JP2228535A | ||||
| JP63063736U |
Attorney, Agent or Firm:
Iwata Today sentence
Sayori Seto
Sayori Seto