Title:
CRYSTAL GROWTH APPARATUS
Document Type and Number:
Japanese Patent JP2018177572
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a crystal growth apparatus capable of efficiently preventing the raw material of a crucible bottom from being solidified accompanying a long size of a crystal body to be grown in an apparatus for growing a single crystal by the Czochralski method.SOLUTION: The crystal growth apparatus comprises: a metal crucible capable of storing and holding a raw material melt; an induction coil provided in the periphery of the crucible; a crucible table for supporting the crucible from below; and a bottom auxiliary heating element having a specified shape in the inside of the crucible table and horizontally installed. The bottom auxiliary heating element is divided into a plurality of pieces and is movable in the horizontal direction.SELECTED DRAWING: Figure 2
Inventors:
ISHIKAWA HARUO
SUGIYAMA MASASHI
MAKI KOICHIRO
SUGIYAMA MASASHI
MAKI KOICHIRO
Application Number:
JP2017077547A
Publication Date:
November 15, 2018
Filing Date:
April 10, 2017
Export Citation:
Assignee:
SUMITOMO METAL MINING CO
International Classes:
C30B15/14; F27B14/14
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito