Title:
CRYSTAL VIBRATOR AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3446368
Kind Code:
B2
Abstract:
PURPOSE: To reduce the cost and to allow the method to have provision for a higher frequency vibrator by manufacturing the vibrator with an optional film thickness and shape without the need for a large scale equipment like a hydrothermal synthesis.
CONSTITUTION: A single crystal thin film crystal whose thickness is 5nm or over and 50μm or less manufactured by the sol gel method is used for a vibration section. The crystal vibrator is manufactured by forming an oxide single crystal film 2 using a GeO2 as a major component on the single crystal substrate 1, forming a single crystal thin film crystal 3 on the oxide single crystal film 2, solving the oxide single crystal film 2 in a water solution to exfoliate the single crystal thin film crystal 3 from the single crystal substrate 1 and the single crystal thin film crystal 3 is set as a vibration section.
Inventors:
Motoyuki Tanaka
Takahiro Imai
Naoji Fujimori
Takahiro Imai
Naoji Fujimori
Application Number:
JP1689395A
Publication Date:
September 16, 2003
Filing Date:
February 03, 1995
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C01G17/02; C30B5/00; H01L41/08; H01L41/39; H03H3/02; H03H9/19; (IPC1-7): H03H9/19; C01G17/02; C30B5/00; H01L41/08; H01L41/24; H03H3/02
Domestic Patent References:
| JP8157297A | ||||
| JP632613A | ||||
| JP64849B1 | ||||
| JP646159B1 |
Attorney, Agent or Firm:
Masao Yamamoto
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