Title:
CRYSTAL VIBRATOR
Document Type and Number:
Japanese Patent JP3258070
Kind Code:
B2
Abstract:
PURPOSE: To attain processing with high accuracy by forming a crystal from a XY' plane crystal substrate with respect to a Y' axis in which the Y axis is tilted by a specific angle in the Z axis direction around one side X axis of the crystal substrate, deciding the vibration frequency with the width in the Y' axis direction and forming the exciting electrode film onto the XZ' plane.
CONSTITUTION: One side of a crystal substrate 11 cut off from a crystal ore is takes as the X axis, and the Y' axis is taken by tilting the Y axis toward the Z axis by 30-40° around the X axis and the substrate is in parallel with the XY' plane. The photolithography or the etching processing is optimum to manufacture the crystal chip 13 formed to the substrate 11 and since the vibration frequency depends on the width W in the direction of the Y' axis, any shape is formed on the substrate 11. The electrode film 15 is formed to both side faces being the XZ' planes of the crystal chip 13, the crystal chip 13 is excited, and the speed of the chemical etching is nearly equal to that of a tuning fork crystal vibrator because the Z plate is used for the substrate 11. Since the vibration frequency depends on the width and the outer shape is formed flat, the crystal is processed with high accuracy.
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Inventors:
Shigeru Kizaki
Toshihiko Nakayama
Toshihiko Nakayama
Application Number:
JP8504392A
Publication Date:
February 18, 2002
Filing Date:
March 09, 1992
Export Citation:
Assignee:
Citizen Watch Co., Ltd.
International Classes:
H03H9/19; (IPC1-7): H03H9/19
Domestic Patent References:
| JP6130736A | ||||
| JP5384592A | ||||
| JP52137991A | ||||
| JP5290289A | ||||
| JP5443489A | ||||
| JP230635U |