Title:
CUBIC BORON NITRIDE FILM FIELD ELECTRON EMITTER AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2009158345
Kind Code:
A
Abstract:
To provide a film containing cubic boron nitride having a shape suitable for electron emission.
The field electron emitter comprises a film excellent in electron emission using a film containing cubic boron nitride having high crystallinity, sufficient film thickness, adhesion, and high-density fine projections on the surface. The film contains cubic boron nitride formed by a method for depositing boron nitride by using plasma from molecular species containing boron, nitrogen and fluorine.
Inventors:
Teii, Kimimoto
Matsumoto, Seiichiro
Matsumoto, Seiichiro
Application Number:
JP2007000336428
Publication Date:
July 16, 2009
Filing Date:
December 27, 2007
Export Citation:
Assignee:
NATIONAL INSTITUTE FOR MATERIALS SCIENCE
KYUSHU UNIV
KYUSHU UNIV
International Classes:
H01J1/304; H01J9/02; H01J1/30; H01J9/02
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