Title:
電流導入構造
Document Type and Number:
Japanese Patent JP5154480
Kind Code:
B2
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Inventors:
Kazuki Iio
Application Number:
JP2009056450A
Publication Date:
February 27, 2013
Filing Date:
March 10, 2009
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
C23C14/32; H05H1/48
Domestic Patent References:
| JP10298741A | ||||
| JP2002115054A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yoshiki Kuroki