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Patent Searching and Data


Title:
CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2019212734
Kind Code:
A
Abstract:
To provide a cutting device that is able to minimize the possibility that cutting liquid entering from a gap between the frame body of a chuck table and a table base from reaching a porous plate.SOLUTION: A cutting device includes: a chuck table in which a porous plate is fixed to a recess in a frame body with an adhesive and that has in the frame body a first passage one end of which connects to the recess and the other end of which is open in a lower surface of the frame body; a cutting unit that cuts a work piece held on the chuck table; a cutting liquid supply nozzle that supplies cutting liquid to the work piece when the work piece is cut by the cutting unit; a table base on an upper surface side of which the frame body of the chuck table is placed; and a second passage one end of which is connected to a suction port of an ejector and the other end of which is open in an upper surface of the table base and that connects to the other end of the first passage while the frame body is placed on the table base. The second passage is provided with a first check valve and a second check valve.SELECTED DRAWING: Figure 3

Inventors:
HATA AKIRA
OKUNARI KENGO
Application Number:
JP2018106966A
Publication Date:
December 12, 2019
Filing Date:
June 04, 2018
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23Q3/08; B24B27/06; B24B41/06; H01L21/683
Domestic Patent References:
JP2008078424A2008-04-03
JP2008177406A2008-07-31
JP2017028157A2017-02-02
JPH08108329A1996-04-30
JP2003145377A2003-05-20
JP2016022552A2016-02-08
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro