Title:
Cutting apparatus
Document Type and Number:
Japanese Patent JP6069122
Kind Code:
B2
Abstract:
A cutting unit includes a spindle housing, a spindle, a mounter fixed to the front end portion of the spindle for supporting a cutting blade, and a fixing flange for fixing the cutting blade to the mounter. The mounter includes a boss portion for axially slidably supporting the fixing flange, the boss portion being fitted to an engaging hole formed in a central portion of the fixing flange, a flange portion projecting radially outward from the outer circumference of the boss portion, the flange portion having a supporting surface for supporting the cutting blade on the front side opposed to the fixing flange, and a cylindrical portion formed on the rear side of the flange portion. The flange portion has a suction hole opening. The cylindrical portion has a communication passage communicating with the suction hole. The communication passage is connected through a rotary joint to a suction unit.
Inventors:
Nobuhiko Wakita
Application Number:
JP2013151913A
Publication Date:
February 01, 2017
Filing Date:
July 22, 2013
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06
Domestic Patent References:
| JP2010284774A | ||||
| JP7003952U | ||||
| JP2003165036A | ||||
| JP2007216377A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sayaka Hirakawa
Sachiko Okunuki
Sayaka Hirakawa