Title:
Cutting apparatus
Document Type and Number:
Japanese Patent JP6223862
Kind Code:
B2
Inventors:
Manpei Tanaka
Yagihara Atsushi
Shintaro Matsuoka
Yamato Aimi
Fanchuk Lin
Yagihara Atsushi
Shintaro Matsuoka
Yamato Aimi
Fanchuk Lin
Application Number:
JP2014036565A
Publication Date:
November 01, 2017
Filing Date:
February 27, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B49/12
Domestic Patent References:
| JP2010184331A | ||||
| JP7051221Y2 | ||||
| JP2003124152A | ||||
| JP8124882A | ||||
| JP2011236024A | ||||
| JP2012222075A | ||||
| JP2005142202A |
Attorney, Agent or Firm:
Kyoko Kawamura
Isao Sasaki
Ken Kubo
Patent Business Corporation Tokyo Alpa Patent Office
Isao Sasaki
Ken Kubo
Patent Business Corporation Tokyo Alpa Patent Office