Title:
切削装置の切削ブレード検出機構
Document Type and Number:
Japanese Patent JP5236917
Kind Code:
B2
Inventors:
Kazuma Sekiya
Shigeru Ishii
Shigeru Ishii
Application Number:
JP2007253244A
Publication Date:
July 17, 2013
Filing Date:
September 28, 2007
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B49/12; H01L21/301
Domestic Patent References:
| JP3088345U | ||||
| JP5060513A | ||||
| JP2006310396A | ||||
| JP59142061A | ||||
| JP2000188267A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki