Title:
切削装置、及び、切削方法
Document Type and Number:
Japanese Patent JP7428519
Kind Code:
B2
Abstract:
To provide a new technique that enables cutting liquid to be optimally supplied to a cutting blade.SOLUTION: A cutting device comprises: a cutting unit 34 having a cutting blade 38; a holding table 8 including a holding surface for holding a work-piece 20 that is to be cut with the cutting blade 38; cutting liquid nozzles (blade cooler nozzles 41a and 41b and a shower nozzle 46) that jet and supply cutting liquid toward the cutting blade 38 that cuts the work-piece 20 held by the holding table 8; cooling liquid nozzles 60a and 60b that jet cooling liquid in a direction in which the cutting blade 38 is avoided; and a controller 10 that performs control so that supply of the cutting liquid from cutting liquid nozzles (the blade cooler nozzles 41a and 41b and the shower nozzle 46) is stopped when the work-piece 20 is not cut with the cutting blade 38 and cooling water is supplied from the cooling water nozzles 60a and 60b.SELECTED DRAWING: Figure 2
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Inventors:
Naoko Yamamoto
Application Number:
JP2020003153A
Publication Date:
February 06, 2024
Filing Date:
January 10, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23Q11/10; B24B55/02; B23Q11/12; B24B27/06; H01L21/301
Domestic Patent References:
JP2005167145A | ||||
JP2014180738A | ||||
JP2018133387A | ||||
JP2004303855A |
Attorney, Agent or Firm:
Hiroshi Ogami
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