Title:
切断装置、及び、切断品の製造方法
Document Type and Number:
Japanese Patent JP7203712
Kind Code:
B2
Abstract:
Provided are a cutting device in which a blade and a working fluid are sufficiently in contact when the blade is rotated and a manufacturing method of a cut product. The cutting device includes a cutting table, a processing liquid supply unit, and a cutting machine. The cutting table is configured to mount a cutting target. The processing liquid supply unit is configured to supply a processing liquid to the cutting table. The cutting machine is configured to cut the cutting target while the cutting target is immersed in the processing liquid. The cutting machine includes a blade, a rotating machine, and a blocking plate. The rotating machine is configured to rotate the blade. The blocking plate is provided between the tip of the blade on a cutting target side and a rotation shaft of the blade.
Inventors:
Yuya Sakagami
Satoko Hori
Satoko Hori
Application Number:
JP2019207752A
Publication Date:
January 13, 2023
Filing Date:
November 18, 2019
Export Citation:
Assignee:
towa corporation
International Classes:
B24B55/02; B24B27/06; B26D1/15; B26D7/00; B28D1/24; B28D7/02; H01L21/301
Domestic Patent References:
| JP2011042009A | ||||
| JP2007111840A | ||||
| JP2016209998A |
Foreign References:
| DE202006017778U1 |
Attorney, Agent or Firm:
Kenji Tachibana
Go Masuda
Go Masuda
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