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Patent Searching and Data


Title:
CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2013116518
Kind Code:
A
Abstract:

To provide a cutting device having a structure in which an adjustment width such as an air angle and a height or the like is large and which can blow off a cutting fluid by strongly blowing air.

An external air jetting mechanism includes an adjustment means for adjusting a direction and a height of an air jetting nozzle. Air is jetted before a shutter opens an opening to approximately remove a cutting fluid on a workpiece in advance. Accordingly, a water droplet of the cutting fluid is prevented from being scattered by an air jet of an internal air jetting mechanism which is jetted after the opening is opened, and prevented from adhering to an objective lens of a microscope through the opening.


Inventors:
MAEMOKU YOSHIO
ONO TAKAYUKI
Application Number:
JP2011264382A
Publication Date:
June 13, 2013
Filing Date:
December 02, 2011
Export Citation:
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Assignee:
DISCO CORP
International Classes:
B24B55/06; H01L21/301
Domestic Patent References:
JP2002011641A2002-01-15
JP2000306878A2000-11-02
JP2009038181A2009-02-19
JP2004303855A2004-10-28
Attorney, Agent or Firm:
Akira Matsumoto
Hiroshi Oue