Title:
CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2023133867
Kind Code:
A
Abstract:
To prevent adhering of sawdust to a workpiece after cutting during a time period when the workpiece after the cutting is carried into a cleaning unit.SOLUTION: A cutting device includes: a holding table which holds a frame unit including a frame, a sheet, and a workpiece; a cutting unit which cuts the workpiece held by the holding table; a first transfer unit which has a first frame holding part and a workpiece cover part and is used to transfer the frame unit; a dome which is disposed at a moving path of the workpiece cover part, has a protruding curved surface, and is used to cause the workpiece formed with cut grooves to protrude upward through the sheet. The workpiece cover part includes: a housing which may cover the workpiece; a liquid supply part which supplies a liquid to a space of the housing; and an ultrasonic vibration application unit. In a state that the workpiece formed with the cut grooves is immersed in the liquid stored in the space of the housing, the ultrasonic vibration application unit applies ultrasonic vibration to the liquid in the space.SELECTED DRAWING: Figure 1
Inventors:
TAKANORI YU
Application Number:
JP2022039103A
Publication Date:
September 27, 2023
Filing Date:
March 14, 2022
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/06; B23Q11/00; B24B27/06; B24B41/06; H01L21/301
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Toshikazu Imato