切削加工装置 - 株式会社ディスコ

Title:

切削加工装置

Document Type and Number:

Japanese Patent JP5654826

Kind Code:

B2

Inventors:

前杢芳雄

Application Number:

JP2010226427A

Publication Date:

January 14, 2015

Filing Date:

October 06, 2010

Export Citation:

Assignee:

株式会社ディスコ

International Classes:

B23Q11/08; H01L21/301

Attorney, Agent or Firm:

Isao Sasaki
Kyoko Kawamura
Ken Kubo

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