Title:
切削装置
Document Type and Number:
Japanese Patent JP5758111
Kind Code:
B2
Abstract:
A cutting apparatus including a chuck table for holding a workpiece, a cutting unit having a cutting blade for cutting the workpiece held on the chuck table, a cutting water supplying unit for supplying a cutting water to a work portion to be cut by the cutting blade, a pair of vibrating plates provided on the opposite sides of the cutting blade in such a manner that a spacing for forming a cutting water layer is defined between the upper surface of the workpiece held on the chuck table and the lower surface of each vibrating plate, and an ultrasonic vibrator for giving ultrasonic vibration to the vibrating plates.
Inventors:
Akatsuki Qiu
Application Number:
JP2010269444A
Publication Date:
August 05, 2015
Filing Date:
December 02, 2010
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301
Domestic Patent References:
| JP2009059749A | ||||
| JP2008306108A | ||||
| JP2005150360A | ||||
| JP2003059875A | ||||
| JP2002280343A |
Foreign References:
| US6021785 |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki