Title:
切削装置
Document Type and Number:
Japanese Patent JP6973931
Kind Code:
B2
Abstract:
The invention provides a cutting device which does not use an independent conveying mechanism to convey a processed object. The cutting apparatus includes: a cutting unit that cuts a workpiece with acutting tool; a machining feed unit that moves the chuck table between a machining region in which the workpiece is cut and a carrying-in/out region in which the workpiece is carried in/out; a movingunit that moves the cutting unit in an indexing feeding direction and a direction perpendicular to the holding surface; a mounting region on which the workpiece to be machined before cutting is mounted; a moving-out unit that moves out the cut workpiece; and a transport pad that transports the pre-cut workpiece to a chuck table located in the input/output region and transports the cut workpiece tothe output unit. The transfer pad is attached to and detached from the moving unit and attracts and holds the workpiece in a state where the transfer pad is attached to the moving unit, thereby attracting and holding the workpiece and moving the workpiece by the moving unit to transfer the workpiece.
Inventors:
Fukuoka Takeomi
Application Number:
JP2017248292A
Publication Date:
December 01, 2021
Filing Date:
December 25, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B41/06; B24B27/06; H01L21/301
Domestic Patent References:
| JP2017098471A | ||||
| JP2017084950A | ||||
| JP2010045196A |
Foreign References:
| US20040083868 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro
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