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Patent Searching and Data


Title:
CUTTING METHOD FOR CYLINDRICAL WORK
Document Type and Number:
Japanese Patent JP2000176820
Kind Code:
A
Abstract:

To reduce the depth of a working-altered layer of the cut surface of a work (wafer) without impairing the cutting efficiency.

In this cutting method, a cylindrical work 1 is cut while the cylindrical work 1 is pressed against a wire 4 running at high speed, and slurry 3 containing abrasive grains are fed to the wire 4. As the abrasive grains contained in the slurry 3, the abrasive grains in which a mixing ratio of the abrasive grains with an average particle size of 10 to 30 μm to the abrasive grains with an average particle side of 0.1 to 2 μm is 8:2 to 3:7, are used.


Inventors:
INABA AKIHIRO
TANAKA NOBUTAKA
Application Number:
JP35013098A
Publication Date:
June 27, 2000
Filing Date:
December 09, 1998
Export Citation:
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Assignee:
MEMC KK
International Classes:
B24B57/02; B24B27/06; B28D5/04; (IPC1-7): B24B27/06; B24B57/02; B28D5/04
Attorney, Agent or Firm:
Ippei Watanabe