Title:
Cutting method
Document Type and Number:
Japanese Patent JP6274926
Kind Code:
B2
Abstract:
A cutting method for cutting by a cutting blade a workpiece which includes metal at least in a predetermined cutting position. The cutting method includes a cutting step of cutting by the cutting blade the predetermined cutting position of the workpiece while supplying a cutting fluid, containing an organic acid and an oxidizing agent, to a processing point at which the cutting blade cuts into the workpiece.
Inventors:
Kenji Takenouchi
Application Number:
JP2014053195A
Publication Date:
February 07, 2018
Filing Date:
March 17, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06
Domestic Patent References:
| JP2012019219A | ||||
| JP2001308037A | ||||
| JP2009032726A | ||||
| JP7211670A |
Foreign References:
| US20040209443 | ||||
| US20070269980 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto