PURPOSE: To provide the microminiature optical scanner having high reliability relating to the optical scanner which can be utilized for writing with facsimiles and printers, for tracking adjustment of an optical pickup and future optical information processing fields.
CONSTITUTION: This optical scanner consists of a mirror part 1 which is formed by subjecting the mirror finished surface of a silicon substrate to metal coating and reflects a semiconductor laser beam, a beam for scanning which supports the mirror part 1 from both sides to generate the twist in a uniaxial direction, the outer peripheral part of the mirror which is formed integrally therewith and is used to join these parts to a glass substrate 7, driving electrodes 4 which are arranged in the position facing the rear surface of the mirror part, an insulating film 5 for insulating these driving electrodes 4, a gap forming part 6 which determines the gap between the mirror part 1 and the driving electrodes 4 and the glass substrate 7 which has the driving electrodes 4, the insulating film 5 and the gap forming part 6. The outer peripheral part 3 of the mirror and the gap forming part 6 are anode joined, by which the integrated optical scanner is obtd.
KANEMATSU SHIYUUKO
AZUMA NAOKO
NAKAMURA KUNIHIKO
| JP3060311U | 1999-08-31 |