Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CUTTING OF SEMICONDUCTOR INGOT
Document Type and Number:
Japanese Patent JP06270136
Kind Code:
A
Abstract:

PURPOSE: To slice a semiconductor ingot having a larger caliber without increasing the diameter of a cutter blade.

CONSTITUTION: A hole 6a is axially bored in the center part of a semiconductor ingot 6 to be cut to be filled with an adhesive 10 and this semiconductor ingot 6 is positioned within the central circular hole 3a provided at the center of a cutter blade 3 rotating at a high speed to be sent under rotation. By this constitution, the semiconductor ingot 6 is sliced by the inner blade 3b provided to the inner peripheral part of the circular hole 3a. Since the semiconductor ingot 6 can be cut by the cutter blade 3 wherein the distance from the inner blade 3b to the outer periphery thereof is slightly larger than the radius of the semiconductor ingot 6, the semiconductor ingot 6 having a large caliber can be cut without increasing the diameter of the cutter blade 3.


Inventors:
Yamagishi, Makoto
Application Number:
JP1993000061578
Publication Date:
September 27, 1994
Filing Date:
March 22, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
KOMATSU LTD
International Classes:
B24B27/06; B28D5/00; B28D5/02; H01L21/304; B24B27/06; B28D5/00; H01L21/02; (IPC1-7): B28D5/00; B24B27/06; B28D1/22; H01L21/304