Title:
CVD METHOD AND CVD DEVICE USED
Document Type and Number:
Japanese Patent JPS51147258
Kind Code:
A
Abstract:
PURPOSE:To allow easy control of thickness of CVD film by knowing the used quantity of a liquid source.
Inventors:
MISHIMAGI HIROMITSU
KODERA HIROSHI
KODERA HIROSHI
Application Number:
JP7081075A
Publication Date:
December 17, 1976
Filing Date:
June 13, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/205; C23C16/448; C23C16/52; H01L21/223; H01L21/283; H01L21/31; (IPC1-7): H01L21/20; H01L21/22; H01L21/28; H01L21/31