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Title:
CYCLIC STRUCTURE-BEARING FLUORINE-CONTAINING MONOMER, METHOD FOR PRODUCING THE SAME, POLYMER, PHOTORESIST COMPOSITION AND METHOD FOR FORMING PATTERN
Document Type and Number:
Japanese Patent JP2006152255
Kind Code:
A
Abstract:

To obtain a new cyclic structure-bearing fluorine-containing monomer that is useful as a raw material for a functional material, a medicine/agrochemical, etc., has excellent transparency to radiation with a wavelength of above all ≤500 nm, especially ≤300 nm and is exceedingly useful as a monomer for producing a base resin of a radiation-sensitive resist composition having improved development properties due to having a phenol-like acidic hydroxy group, to use the polymer of the monomer as a base resin for a radiation-sensitive resist composition and to effectively utilize a hydroxy group having proper acidity so as to reduce, for example, swelling, prevent pattern degradation, suppress T-top shape development and improve dimensional uniformity.

The cyclic structure-bearing fluorine-containing monomer is represented by general formula (1) (Z is a polymerizable unsaturated group-containing bifunctional organic group).


Inventors:
Kanou, Takeshi
Watanabe, Takeshi
Ohashi, Masaki
Hasegawa, Koji
Tachibana, Seiichiro
Application Number:
JP2005000308044
Publication Date:
June 15, 2006
Filing Date:
October 24, 2005
Export Citation:
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Assignee:
SHIN ETSU CHEM CO LTD
International Classes:
C08F20/28; C07D307/20; C07D307/83; C07D309/12; C07D319/06; C08F32/00; G03F7/039; H01L21/027; C08F20/00; C07D307/00; C07D309/00; C07D319/00; C08F32/00; G03F7/039; H01L21/02