Title:
【発明の名称】面形状測定装置
Document Type and Number:
Japanese Patent JP3100717
Kind Code:
B2
Inventors:
Makoto Iki
Hirofumi Matsuo
Masahiro Ohno
Masato Noguchi
Hirofumi Matsuo
Masahiro Ohno
Masato Noguchi
Application Number:
JP34929591A
Publication Date:
October 23, 2000
Filing Date:
October 31, 1991
Export Citation:
Assignee:
Asahi Optical Co., Ltd.
International Classes:
G01B11/24; G01M11/00; (IPC1-7): G01B11/24
Domestic Patent References:
| JP58176511A |
Attorney, Agent or Firm:
Tamio Nishiwaki