Title:
【発明の名称】量子細線構造体の製造方法
Document Type and Number:
Japanese Patent JP3146457
Kind Code:
B2
Inventors:
Mitsutaka Tsubokura
Application Number:
JP561891A
Publication Date:
March 19, 2001
Filing Date:
January 22, 1991
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/20; H01L21/203; H01L21/205; H01L29/06; H01L29/80; H01S5/028; H01S5/32; H01S5/34; H01S5/40; (IPC1-7): H01L21/20; H01L29/80
Domestic Patent References:
| JP63175489A | ||||
| JP6329989A |
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)
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