Title:
アンカー中のＭＩＭＳを使用するＤＶＣ
Document Type and Number:
Japanese Patent JP7021947
Kind Code:
B2
Abstract:
The present disclosure generally relates to a MEMS DVC utilizing one or more MIM capacitors located in the anchor of the DVC and an Ohmic contact located on the RF-electrode. The MIM capacitor in combination with the ohmic MEMS device ensures that a stable capacitance for the MEMS DVC is achieved with applied RF power.
Inventors:
Robertus Petrus van Kampen
Robert Gaddy
Richard El Naipe
Robert Gaddy
Richard El Naipe
Application Number:
JP2017541645A
Publication Date:
February 17, 2022
Filing Date:
January 28, 2016
Export Citation:
Assignee:
CAVENDISH KINETICS, INC.
International Classes:
H01G5/38; B81B3/00; B81C1/00
Domestic Patent References:
| JP2010245276A | ||||
| JP2005528751A |
Foreign References:
| WO2014165624A1 | ||||
| US20050248423 |
Attorney, Agent or Firm:
Takuji Yamada
Haruo Nakano
Haruo Nakano