Title:
FORMATION OF OPTICAL WAVEGUIDE
Document Type and Number:
Japanese Patent JP3195033
Kind Code:
B2
Abstract:
PURPOSE: To form the optical waveguide of a long wavelength band (1.3μm) having good quality without depending on polarized light at the time of diffusing and forming the optical waveguide of Ti on an X-cut LN crystal substrate.
CONSTITUTION: The temp. to diffuse Ti is set at a temp. higher than 1020°C and the time for the diffusion thereof is set at the time longer than 6 hours at the time of forming the Ti-diffused optical waveguide along the Z-axis on an LN crystal substrate 1. The thickness d of the Ti film and the pattern width w of the optical waveguide are set at conditions of 350A≤d≤450A and 5μ≤w≤8μm in the method for forming the optical waveguide 2.
Inventors:
Tadashi Ishikawa
Application Number:
JP5164392A
Publication Date:
August 06, 2001
Filing Date:
March 10, 1992
Export Citation:
Assignee:
Japan Broadcasting Corporation
International Classes:
G02B6/13; G02B6/12; G02F1/035; (IPC1-7): G02B6/13; G02F1/035
Domestic Patent References:
| JP63235914A | ||||
| JP61160704A | ||||
| JP1179001A | ||||
| JP4289827A |
Attorney, Agent or Firm:
Hidekazu Miyoshi (2 outside)
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