Title:
DATA ACQUISITION AND PROCESSING TECHNIQUES FOR THREE-DIMENSIONAL RECONSTRUCTION
Document Type and Number:
Japanese Patent JP2022104896
Kind Code:
A
Abstract:
To provide a method for performing a complete dataset of both of an image and a composition and/or crystal information in the high-speed processing time.SOLUTION: There is provided a generation method for generating data for three-dimensional reconstruction. The generation method at least includes exposing a subsequent surface of a sample, acquiring an image of the subsequent surface, comparing the image of the subsequent surface to an image of a reference surface, based on the comparison exceeding a threshold, acquiring a compositional or crystalline map of the subsequent surface, and based on the comparison not exceeding the threshold, exposing a next surface.SELECTED DRAWING: Figure 3
Inventors:
OLEKSII KAPLENKO
TOMAS VYSTAVEL
PETR WANDROL
ONDREJ MACHEK
TOMAS VYSTAVEL
PETR WANDROL
ONDREJ MACHEK
Application Number:
JP2021209704A
Publication Date:
July 12, 2022
Filing Date:
December 23, 2021
Export Citation:
Assignee:
FEI CO
International Classes:
H01J37/22; H01J37/28; H01J37/317
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Osamu Miyazaki
Tadahiko Ito
Osamu Miyazaki
Previous Patent: Photoresist topcoat composition and pattern forming method
Next Patent: Androgen receptor binding molecule and its use
Next Patent: Androgen receptor binding molecule and its use