To enable data collected from substrate processing equipments to be compared with each other and displayed.

Various kinds of data collected from semiconductor manufacturing equipment A, B and C are stored in a memory 32, data read out from the memory 32, instruction input means and buttons are outputted and displayed by a display means 35, and, when an operator's instructions as to the menus and buttons outputted and displayed are inputted through an input means 36, data, instruction input menus and buttons which are to be outputted and displayed are switched by a display control means 34 corresponding to the inputted instructions. Furthermore, a device detailed image plane which displays various kinds of data for a certain device by the functions of the display control means 34 is switched to display only the data selected by an operator as to another device selected by the operator, whereby data as to devices are displayed as compared with each other.