DATA MANAGEMENT DEVICE AND MONITORING METHOD FOR DATA MANAGEMENT DEVICE

Title:

DATA MANAGEMENT DEVICE AND MONITORING METHOD FOR DATA MANAGEMENT DEVICE

Document Type and Number:

Japanese Patent JP2017142634

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a technology for, when an application in a server takes an unexpected behavior, accurately monitoring the state in a data management device.SOLUTION: A data management device comprises: a data analysis unit for processing operation data of a semiconductor manufacturing device transferred from a data collection unit which collects the operation data; and a state monitoring unit for monitoring a state of the data analysis unit on the basis of a monitoring time. The monitoring time is a sum of a first time as a time required for transferring the operation data to the data analysis unit and a second time as a time required for processing the operation data by the data analysis unit.SELECTED DRAWING: Figure 1

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Inventors:

KAGOSHIMA AKIRA
SHIRAISHI DAISUKE
HASE YUJI

Application Number:

JP2016023230A

Publication Date:

August 17, 2017

Filing Date:

February 10, 2016

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP

International Classes:

G06F11/07; G05B19/418; G05B23/02; H01L21/02

Attorney, Agent or Firm:

Yuji Toda

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