To make it easy to visually recognize a failing position of a power source by providing a formation means sand a display means for a distribution image of resistance values of wirings of the power source in every minute area.
A CPU 11 carries out operations for a pseudo three-dimensional display and transmits the data to a graphic display processor 361. Because of a plotting treatment by the processor 361, data of a pseudo three-dimensional image are formed in a frame buffer 364 and displayed at a CTR display 366 via a dot shifter 365. The position of a bump of an LSI to be measured and the resistance value are respectively indicated by an X-Y coordinate and a Z coordinate at the CRT 366. A falling position displayed in the pseudo three- dimensional display image, namely, a position where the resistance value minimum is a failing position corresponding to the position where a shortcircuited resistor is present. A Z-axis indicates the resistance value which falls differently spending on a value of the shortcircuited resistor. The failing position of power source of the LSI to be measured can be visually recognized from the pseudo three-dimensional display image.
NONAMI HIDEAKI
HOSOE HIDEYUKI
HONMA KENJI
FUJISAKI YASUNORI
