PURPOSE: To provide a processing method of fluorocarbon to efficiently change fluorocarbon into a harmless material without producing a harmful material.
CONSTITUTION: Fluorocarbon used for cleaning is decomposed by the following method. A catalyst is heated in an electric furnace while nitrogen gas 1 is made to flow through the catalyst layer. Then hydrogen 2 in an amt. five or more times as the molar number of the fluorocarbon to be processed is added to the nitrogen gas and introduced into the catalyst layer. The fluorocarbon changed into a gaseous state is added to the gas to obtain about 3% concn. and decomposed. Methane, hydrogen chloride, hydrogen fluoride and the like as the gas 4 produced by the decomposition are introduced into an alkali soln. and neutralized to make the acid component harmless.
ARATO TOSHIAKI
YAMASHITA HISAO
AZUHATA SHIGERU
TAMADA SHIN
KATO AKIRA
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