Title:
減圧乾燥装置
Document Type and Number:
Japanese Patent JP4319175
Kind Code:
B2
Abstract:
Decompression drier 23b has the carrying port 61 where the LCD substrate G is carried in and the carrying out port 62 where the LCD substrate G is carried out in the side wall section, the chamber 6 which accommodates the LCD substrate G which is carried from the carrying port 61 in abbreviation horizontal state, the gate component 63, 64 which opens and closes the carrying port 61 and the carrying out port 62, the decompression mechanism which decompresses inside the chamber 6 when the carrying port 61 and the carrying out port 62 has been blocked by the gate component 63, 64, abbreviation conveying the LCD substrate G, horizontally, as from the carrying port 61 it carries into the chamber 6, after the decompression drying processing due to the decompression mechanism, abbreviation conveying horizontally, the conveying mechanism 7 which it carries out outside the chamber 6 from the carrying out port 62, and inside the chamber 6, without supporting the LCD substrate G locally, equally support possible belt 71.
Inventors:
Takahiro Sakamoto
Mitsuhiro Sakai
Shunichi Yahiro
Mitsuhiro Sakai
Shunichi Yahiro
Application Number:
JP2005233092A
Publication Date:
August 26, 2009
Filing Date:
August 11, 2005
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F26B5/04; F26B9/06; F26B15/12; F26B15/18; F26B25/00; G02F1/13
Domestic Patent References:
| JP6050661A | ||||
| JP2004299850A | ||||
| JP2005134013A |
Attorney, Agent or Firm:
Hiroshi Takayama