Title:
減圧乾燥装置
Document Type and Number:
Japanese Patent JP6907280
Kind Code:
B2
Abstract:
To provide a vacuum dryer capable of forming a coating film of a highly uniform film thickness on a base plate.SOLUTION: A vacuum dryer 3 comprising a chamber 6 storing a base plate 7 whereon a coating liquid film 8 containing a solvent is coated, a decompressing/exhausting part 20 that decompresses/exhausts the inside of the chamber 6, and evaporation accelerators 30, 35 that accelerate the evaporation of the solvent from the coating liquid film 8, is characterized in that the evaporation accelerators 30, 35 are disposed in the vicinity of the liquid periphery 49 of the coating liquid film 8 coated on the base plate 7.SELECTED DRAWING: Figure 5
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Inventors:
Fukui Shinya
Masaki Yokoyama
Toshio Kobe
Masaki Yokoyama
Toshio Kobe
Application Number:
JP2019166447A
Publication Date:
July 21, 2021
Filing Date:
September 12, 2019
Export Citation:
Assignee:
Chugai Furnace Industry Co., Ltd.
International Classes:
F26B3/20; B05C9/14; B05C15/00; F26B5/04
Domestic Patent References:
| JP2003269859A |
Attorney, Agent or Firm:
Takuji Yamada
Yukino Okunishi
Yukino Okunishi