Title:
Decompression system
Document Type and Number:
Japanese Patent JP5978045
Kind Code:
B2
Inventors:
Yoshiji Fujii
Application Number:
JP2012165512A
Publication Date:
August 24, 2016
Filing Date:
July 26, 2012
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F25B9/00
Domestic Patent References:
| JP2000121192A | ||||
| JP2004003792A | ||||
| JP2012067633A | ||||
| JP2007502928A |
Foreign References:
| WO2010038416A1 | ||||
| WO2011007652A1 |
Attorney, Agent or Firm:
Seiryu Corporation