Title:
減圧処理装置および減圧処理方法
Document Type and Number:
Japanese Patent JP5134317
Kind Code:
B2
Inventors:
Hidenori Miyamoto
Application Number:
JP2007230866A
Publication Date:
January 30, 2013
Filing Date:
September 06, 2007
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
F26B5/04; B05C9/12; B05D3/12
Domestic Patent References:
| JP2007040559A | ||||
| JP2003168643A | ||||
| JP2003272992A |
Attorney, Agent or Firm:
Yu Koyama