To prevent condensation of hydrogen peroxide gas in a decontamination object chamber in decontamination that uses the hydrogen peroxide gas as decontamination gas.
A yield of hydrogen peroxide gas G in a gas evolution means 1 is regulated, a hydrogen peroxide gas concentration c of a decontamination object chamber 5 is regulated to a target concentration cm, base on measurement absolute humidity x of the decontamination object chamber 5 and the target concentration cm, a condensation temperature td of the hydrogen peroxide gas G in the decontamination object chamber 5 in a state of the measurement absolute humidity state x and in a state in which the hydrogen peroxide gas concentration c is the target concentration cm is calculated, and a temperature t of the decontamination object chamber 5 is regulated to a temperature tm that is higher than a calculated condensation temperature td (tm>td) by regulating heat output of a heating means 6 based on the calculated condensation temperature td.
HASHIMOTO SHINICHI
KODERA KEISUKE
MAEKAWA HIROYUKI
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