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Title:
DECONTAMINATION METHOD AND DECONTAMINATION SYSTEM
Document Type and Number:
Japanese Patent JP2013215675
Kind Code:
A
Abstract:

To prevent condensation of hydrogen peroxide gas in a decontamination object chamber in decontamination that uses the hydrogen peroxide gas as decontamination gas.

A yield of hydrogen peroxide gas G in a gas evolution means 1 is regulated, a hydrogen peroxide gas concentration c of a decontamination object chamber 5 is regulated to a target concentration cm, base on measurement absolute humidity x of the decontamination object chamber 5 and the target concentration cm, a condensation temperature td of the hydrogen peroxide gas G in the decontamination object chamber 5 in a state of the measurement absolute humidity state x and in a state in which the hydrogen peroxide gas concentration c is the target concentration cm is calculated, and a temperature t of the decontamination object chamber 5 is regulated to a temperature tm that is higher than a calculated condensation temperature td (tm>td) by regulating heat output of a heating means 6 based on the calculated condensation temperature td.


Inventors:
IWAI SAKAE
HASHIMOTO SHINICHI
KODERA KEISUKE
MAEKAWA HIROYUKI
Application Number:
JP2012088365A
Publication Date:
October 24, 2013
Filing Date:
April 09, 2012
Export Citation:
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Assignee:
TAIKISHA KK
International Classes:
B01J7/02; A61L2/20
Domestic Patent References:
JP2011244891A2011-12-08
JP2006116095A2006-05-11
JP2012034780A2012-02-23
JP2003339829A2003-12-02
JP2010115451A2010-05-27
JP2006288527A2006-10-26
JP2005218548A2005-08-18
Foreign References:
US20080038166A12008-02-14
US20120020848A12012-01-26
Attorney, Agent or Firm:
Shuichiro Kitamura
Takashi Ota
Masahiro Miyaji