Title:
【発明の名称】基板の洗浄方法および基板洗浄装置
Document Type and Number:
Japanese Patent JP3125753
Kind Code:
B2
Inventors:
Hidemitsu Aoki
Application Number:
JP18503598A
Publication Date:
January 22, 2001
Filing Date:
June 30, 1998
Export Citation:
Assignee:
NEC
International Classes:
G03F7/30; B08B3/08; C11D7/06; C11D7/18; C11D7/60; H01L21/304; (IPC1-7): B08B3/08; C11D7/06; C11D7/18; C11D7/60; G03F7/30; H01L21/304
Domestic Patent References:
| JP4179225A | ||||
| JP5946032A | ||||
| JP8250460A | ||||
| JP7183265A |
Attorney, Agent or Firm:
Isamu Takahashi