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Patent Searching and Data


Title:
Deep ultraviolet chemicals amplification type positive type photoresist
Document Type and Number:
Japanese Patent JP6169478
Kind Code:
B2
Inventors:
リュー ルー
シェ チァンシェ
フイ グアンパオ
Application Number:
JP2013227035A
Publication Date:
July 26, 2017
Filing Date:
October 31, 2013
Export Citation:
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Assignee:
京東方科技集團股▲ふん▼有限公司
BOE TECHNOLOGY GROUP CO.,LTD.
International Classes:
G03F7/039; C07C61/29; C08F232/08; G03F7/004
Domestic Patent References:
JP2000298344A
JP11258804A
JP2001261620A
Foreign References:
WO2005052688A1
EP2728408B1
US9023590
Attorney, Agent or Firm:
青木 篤
石田 敬
古賀 哲次
蛯谷 厚志
小林 良博
吉井 一男